Proceedings of the fourth Topical Conference on Microphysics of Surfaces: Beam-Induced Processes - 11-13 February 1991, Eldorado Hotel, Santa Fe, New Mexico. proceedings of the first International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 18-21 March 1991, MCNC, Center for Microelectronics Research Triangle Park, North Carolina

Författare
International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 1991) Triangle Park : Topical Conference on Microphysics of Sufaces: Beam-Induced Processes 1991) Santa Fe :
Genre
Konferenser, Ej skönlitteratur, Konferenspublikation
Språk
Engelska
Förlag År Ort Om boken ISBN
1992 USA 557 sidor.